Synergistic effect on silicon surface under low energy he ion irradiation at elevated temperatures

Title
Synergistic effect on silicon surface under low energy he ion irradiation at elevated temperatures
Authors
Keywords
-
Journal
Thin Solid Films
Volume 785, Issue -, Pages 140094
Publisher
Elsevier BV
Online
2023-10-27
DOI
10.1016/j.tsf.2023.140094

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