Nanomechanical properties of ion induced Si ripple patterns

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Title
Nanomechanical properties of ion induced Si ripple patterns
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 645, Issue -, Pages 265-268
Publisher
Elsevier BV
Online
2017-10-29
DOI
10.1016/j.tsf.2017.10.053

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