Tuning the surface morphology in self-organized ion beam nanopatterning of Si(001) via metal incorporation: from holes to dots

Published 2008 View Full Article

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Title
Tuning the surface morphology in self-organized ion beam nanopatterning of Si(001) via metal incorporation: from holes to dots
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 35, Pages 355306
Publisher
IOP Publishing
Online
2008-07-18
DOI
10.1088/0957-4484/19/35/355306

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