Film bulk acoustic resonators with 400 MHz ultrawide-range tunability using crystalline PZT thin film
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Title
Film bulk acoustic resonators with 400 MHz ultrawide-range tunability using crystalline PZT thin film
Authors
Keywords
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Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 167, Issue -, Pages 107817
Publisher
Elsevier BV
Online
2023-09-03
DOI
10.1016/j.mssp.2023.107817
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