Film bulk acoustic resonators with 400 MHz ultrawide-range tunability using crystalline PZT thin film
出版年份 2023 全文链接
标题
Film bulk acoustic resonators with 400 MHz ultrawide-range tunability using crystalline PZT thin film
作者
关键词
-
出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 167, Issue -, Pages 107817
出版商
Elsevier BV
发表日期
2023-09-03
DOI
10.1016/j.mssp.2023.107817
参考文献
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