Bulk acoustic wave resonator based wireless and passive pressure sensor

Published 2020 View Full Article

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Title
Bulk acoustic wave resonator based wireless and passive pressure sensor
Authors
Keywords
FBAR, Passive wireless sensor, Pressure sensor
Journal
VACUUM
Volume 178, Issue -, Pages 109433
Publisher
Elsevier BV
Online
2020-04-29
DOI
10.1016/j.vacuum.2020.109433

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