Electrically tunable film bulk acoustic resonator based on Au/ZnO/Al structure

Published 2013 View Full Article

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Title
Electrically tunable film bulk acoustic resonator based on Au/ZnO/Al structure
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 103, Issue 6, Pages 062904
Publisher
AIP Publishing
Online
2013-08-08
DOI
10.1063/1.4818157
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