Highly Tunable Film Bulk Acoustic Wave Resonator Based on Pt/ZnO/Fe65Co35 Thin Films

Published 2020 View Full Article

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Title
Highly Tunable Film Bulk Acoustic Wave Resonator Based on Pt/ZnO/Fe65Co35 Thin Films
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Volume 67, Issue 10, Pages 2130-2134
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2020-05-19
DOI
10.1109/tuffc.2020.2995412

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