Development of ScAlN PMUTs for Medical Applications

High-fidelity patterning of AlN and ScAlN thin films with wet chemical etching

(2022) Konsta Airola et al.   Materialia

Efficient Modeling and Simulation of PMUT Arrays in Various Ambients

(2022) Omer M. O. Abdalla et al.   Micromachines

Stability and residual stresses of sputtered wurtzite AlScN thin films

(2021) Elmeri Österlund et al.   Physical Review Materials

Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

(2021) Kristina Bespalova et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A Novel Coupled Piezoelectric Micromachined Ultrasonic Transducer Based on Piston Mode

(2021) Lei Wang et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Eye-Tracking Monitoring Based on PMUT Arrays

(2021) Sheng Sun et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Piezoelectric Micromachined Ultrasonic Transducers With Pinned Boundary Structure

(2020) Yue Liang et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Capacitive micromachined ultrasound transducers for intravascular ultrasound imaging

(2020) Jiaqi Wang et al.   Microsystems & Nanoengineering

Monitoring of the central blood pressure waveform via a conformal ultrasonic device

(2018) Chonghe Wang et al.   Nature Biomedical Engineering

Design, Fabrication, and Characterization of Scandium Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducers

(2017) Qi Wang et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Highly sensitive piezoelectric micromachined ultrasonic transducer operated in air

(2016) Tao Wang et al.   Micro & Nano Letters

Modeling, Fabrication, and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers

(2015) Yipeng Lu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

In vivo real-time 3-D intracardiac echo using PMUT arrays

(2014) David E. Dausch et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Piezoelectric Al1−xScxN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors

(2013) R. Matloub et al.   APPLIED PHYSICS LETTERS