标题
Development of ScAlN PMUTs for Medical Applications
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 32, Issue 5, Pages 505-512
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2023-07-29
DOI
10.1109/jmems.2023.3296159
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- High-fidelity patterning of AlN and ScAlN thin films with wet chemical etching
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