Design, Fabrication, and Characterization of Scandium Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducers

Published 2017 View Full Article

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Title
Design, Fabrication, and Characterization of Scandium Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducers
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 26, Issue 5, Pages 1132-1139
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2017-06-15
DOI
10.1109/jmems.2017.2712101

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