Article
Engineering, Electrical & Electronic
Feng Bu, Bo Fan, Dacheng Xu, Shuwen Guo, Heming Zhao
Summary: This paper analyzes the bandwidth and noise spectra under modulation-demodulation FTR gyroscopes, exploring the effects of loop gain on bandwidth and noise-equivalent rate. The gain of the amplifier circuit is shown to be maximally transferred to the vibration displacement signal conversion part, reducing output noise without impacting bandwidth, providing an effective noise optimization method for high-precision MEMS gyroscopes.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
(2021)
Article
Engineering, Electrical & Electronic
Huan Zhang, Weiping Chen, Liang Yin, Qiang Fu
Summary: This paper presents a fourth-order Sigma Delta ADC for a MEMS gyroscope system, achieving low power consumption and high signal-to-noise ratio through optimizing system performance and designing key circuit modules.
MICROELECTRONICS JOURNAL
(2023)
Article
Nanoscience & Nanotechnology
Jiangkun Sun, Sheng Yu, Yongmeng Zhang, Qingsong Li, Xiang Xi, Kun Lu, Xuezhong Wu, Dingbang Xiao
Summary: This paper presents a novel real-time calibration method for capacitive displacement detection in whole-angle gyroscopes. By utilizing the harmonic components of detective signals for calibration, the method effectively improves the performance of MEMS whole-angle gyroscopes, reducing angle drift and increasing scale-factor nonlinearity to the best reported levels. The innovative calibration method shows promise in addressing traditional issues and achieving significant performance enhancements.
MICROSYSTEMS & NANOENGINEERING
(2021)
Article
Instruments & Instrumentation
Junying Chen, Fu Zhu, Mou Liu, Zhen Meng, Lin Xu
Summary: This paper proposes a method to improve the amplitude stability and frequency tracking ability of the drive control system for MEMS gyroscopes, and verifies the effectiveness of the method through simulation studies and tests on the ASIC platform.
Article
Chemistry, Analytical
Feng Bu, Shuwen Guo, Bo Fan, Yiwang Wang
Summary: This study analyzed the quadrature coupling error that affects the detection output of MEMS gyroscopes and proposed two quadrature error control methods. The experimental results showed that the online compensation method effectively improved the stability and bias performance of the gyroscope.
Article
Optics
Jingtao Yan, Lijun Miao, Min Chen, Tengchao Huang, Shuangliang Che, Xiaowu Shu
Summary: The feedback parameter of closed-loop fiber optic gyroscope (FOG) in various engineering applications is discussed, emphasizing the importance of reasonable feedback parameters to avoid interference and distortion in the output signal. A concise feedback control mode is proposed, along with optimal ranges for different input signals. Experimental results suggest that feedback parameters should be small for static applications and moderate for high response requirements, with special considerations for low-bandwidth measurement fields.
Article
Automation & Control Systems
Paolo Frigerio, Luca Molinari, Andrea Barbieri, Marco Zamprogno, Gianluca Mendicino, Nicolo Boni, Giacomo Langfelder
Summary: This article discusses the challenges of implementing a fully electrical closed-loop control system for high-end applications of quasi-static microscanners. It emphasizes the impacts of ringing modes, spurious modes, and nonlinearity on stability and accuracy. A novel control approach based on nested loops is implemented in a versatile ASIC, allowing for adjustment of coefficients to work with different micromirrors. The results demonstrate successful operation with two micromirrors, achieving sawtooth position control with high refresh rate and high accuracy.
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
(2023)
Article
Engineering, Electrical & Electronic
Paulo A. C. Lopes, Jose Antonio Beltran Gerald
Summary: This study proposes a new approach by removing the AA and RC filters of sigma-delta converters and using oversampled signals directly in an ANC system, allowing for a large sample frequency with significantly reduced computational complexity. The research presents the first short-word length implementation of the LMS algorithm, achieving up to 6 times gains in computational complexity compared to long-word length implementations. Theoretical and simulation results support the effectiveness of the proposed solution.
IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-REGULAR PAPERS
(2021)
Article
Physics, Applied
Huan Zhang, Weiping Chen, Liang Yin, Qiang Fu, Yufeng Zhang
Summary: In this paper, a digital closed-loop measurement and control system for MEMS vibrating silicon gyro is proposed. The system includes the sensitive structure model of the gyro and the design of the interface circuit. The system operates under the condition of modal matching and uses automatic gain control for quick and simple start. Simulation and experiments verified the performance of the system.
MODERN PHYSICS LETTERS B
(2022)
Article
Chemistry, Analytical
Qiang Li, Lifeng Ding, Xiaowei Liu, Qiang Zhang
Summary: In this study, a linearized amplitude control model of the silicon gyroscope drive loop was established to analyze the dynamic characteristics, stability, and setup time of the system. A new silicon gyroscope interface circuit was designed and tested, proving the correctness of the theoretical model and the effectiveness of stability optimization in the closed-loop controlled drive loop of the silicon gyroscope circuit.
Article
Engineering, Electrical & Electronic
Junyi Hu, Shuang Liu, Lu Liu, Huilian Ma
Summary: This article proposes and demonstrates the closed-loop scheme of a broadband source-driven RFOG. By introducing the period-stacking method and compensating for the modulated frequency, the performance of the system is successfully improved.
JOURNAL OF LIGHTWAVE TECHNOLOGY
(2023)
Article
Engineering, Biomedical
John E. Fleming, Sageanne Senneff, Madeleine M. Lowery
Summary: This study presents a multivariable control architecture for selective suppression of motor symptoms in Parkinson's disease (PD) patients. By simultaneously modulating the amplitude and duration of deep brain stimulation (DBS), effective control of both rest tremor and beta activity can be achieved with reduced power delivery. The control architecture also enables automatic regulation of stimulation dosage to prevent overstimulation and save power.
JOURNAL OF NEURAL ENGINEERING
(2023)
Article
Chemistry, Analytical
Huan Zhang, Weiping Chen, Liang Yin, Qiang Fu
Summary: This paper introduces a digital interface ASIC for a MEMS vibratory gyroscope. The driving circuit of the interface ASIC uses an AGC module to achieve self-excited vibration and improve robustness. The mechanically sensitive structure and interface circuit are co-simulated using Verilog-A and SIMULINK. A ADC is designed for digital processing and temperature compensation, and temperature sensing and correction are performed using diode temperature characteristics. The experimental results show high SNR and low nonlinearity for the system.
Article
Engineering, Electrical & Electronic
Rang Cui, Ke Li, Xin Xu, Rihui Xue, Chong Shen, Yunbo Shi, Huiliang Cao
Summary: This article introduces a novel gyroscope quadrature error correction system based on quadrature force correction. The source of quadrature error in MEMS solid-state wave gyroscope is analyzed, which is mainly caused by machining errors. The gyroscope system model is established, and a quadrature error correction method is proposed and simulated. The gyroscope with the quadrature error correction system shows improved performance in a comparative test.
IEEE SENSORS JOURNAL
(2023)
Article
Chemistry, Analytical
Qi Tao, Bin Tang
Summary: This paper presents an implementation scheme and experimental evaluation of a high-linearity closed-loop capacitive accelerometer based on ring-diode capacitance detection. The existing theoretical model error of the ring-diode is corrected by deducing the capacitance detection model considering the influence of the diode. A closed-loop scheme is designed to apply this detection scheme to the parallel-plate accelerometer, and a theoretically absolute linear closed-loop control scheme is proposed. The experimental results show significantly reduced non-linearity compared to using an open-loop.
Article
Chemistry, Analytical
Sina Sadeghpour, Sebastian Meyers, Jean-Pierre Kruth, Jozef Vleugels, Michael Kraft, Robert Puers
Article
Crystallography
Qing Yang, Tong Sun, Xinyu Wu, Guangchao Cui, Mengzheng Yang, Zhongyang Bai, Lin Wang, Helin Li, Wenjing Chen, Qunwen Leng, Robert Puers, Ceyssens Frederik, Michael Kraft, Qinglin Song, Huabin Fang, Dewen Tian, Dexin Wang, Huijie Zhao, Weisheng Zhao, Tianxiao Nie, Qi Guo, Lianggong Wen
Summary: The study proposed an integrable method to detect biofluorescent spectrums using a liquid crystal tunable filter, achieving high-resolution results and clear images. This method has the potential to be a high throughput, low-cost option for high resolution and large field observation applications.
Article
Engineering, Electrical & Electronic
Yuan Wang, Huafeng Liu, Chen Wang, Chun Zhao, Jean-Michel Redoute, Serguei Stoukatch, Qijun Xiao, Liang-Cheng Tu, Michael Kraft
Summary: The paper introduces a hybrid mass sensing system comprised of a QCM mass sensor and a 3-DOF mode localized coupled resonator, capable of achieving mass to stiffness transduction and potential application in the field of biochemical sensing.
IEEE SENSORS JOURNAL
(2021)
Article
Engineering, Electrical & Electronic
Nurul Izni Rusli, Irene Pia Vincentini, Frederik Ceyssens, Michael Kraft
Summary: This paper presents a feasibility study on integrating multiple biosensors on a single chip, including amperometric, potentiometric, and impedimetric detection techniques, as well as physical sensors. The fabricated sensors showed good performance, such as linear working range and fast response time, indicating a promising step towards realizing a real-time measurement platform for bioprocesses.
IEEE SENSORS JOURNAL
(2021)
Article
Chemistry, Analytical
Mathieu Baijot, Robert Puers, Michael Kraft
Summary: This research introduces a new wearable sensor network designed to measure muscle activity and posture specialized for back measurement, which is the thinnest and lightest system known in literature.
Article
Chemistry, Analytical
Rui Amendoeira Esteves, Chen Wang, Michael Kraft
Summary: The surge in fabrication techniques for micro- and nanodevices has led to rapid growth in these technologies and wide-ranging applications. However, the design, simulation, and optimization process for these products has not kept up with the same pace of growth. This work presents a novel methodology for electro-mechanical co-optimization of MEMS inertial sensors, offering an improved system-level design flow and optimized performance.
Article
Engineering, Electrical & Electronic
Yuan Wang, Xiaoxiao Song, Jingqian Xi, Fangzheng Li, Lei Xu, Huafeng Liu, Chen Wang, Shuangyang Kuang, Liang-Cheng Tu, Michael Kraft, Chun Zhao
Summary: This paper presents a miniaturized resonant Lorentz-force magnetometer utilizing blue-sideband actuation to improve sensitivity and resolution. The device consists of a double-ended tuning fork resonator and a Lorentz-force generator structure. The results show that the blue-sideband actuation achieves significantly higher sensitivity and resolution compared to conventional drive schemes.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2022)
Review
Chemistry, Analytical
Linlin Wang, Chen Wang, Yuan Wang, Aojie Quan, Masoumeh Keshavarz, Bernardo Pereira Madeira, Hemin Zhang, Chenxi Wang, Michael Kraft
Summary: This paper discusses the working principle, vibration modes, and applications of coupled BAW MEMS resonators. It is found that lateral modes exhibit higher stiffness and Q factor, reducing the influence of fluid damping.
Article
Engineering, Electrical & Electronic
Aojie Quan, Hemin Zhang, Chen Wang, Chenxi Wang, Linlin Wang, Rui Amendoeira Esteves, Yangyang Guan, Chengxin Li, Michael Kraft
Summary: This article presents a mode-localized mass sensor based on thermal-actuation piezoresistive-detection self-oscillated weakly coupled resonators. The theoretical models and simulations of the self-oscillation of the coupled resonators were verified using optical and electrical measurements. The sensor demonstrated high stability, linearity, sensitivity, and resolution, and achieved significant improvement in parametric sensitivity compared to traditional frequency output metric.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2022)
Article
Engineering, Biomedical
Lara Merken, Maarten Schelles, Frederik Ceyssens, Michael Kraft, Peter Janssen
Summary: This study tested a thin and flexible multi-electrode array (MEA) for recording neuronal activity in large animals and evaluated its compatibility with magnetic resonance imaging (MRI) and long-term recording ability. The results showed excellent MRI compatibility of the arrays and the ability to record single-unit activity and multi-unit activity (MUA) from most of the electrodes. This MEA offers advantages in terms of brain tissue compliance, scalability, and brain coverage.
JOURNAL OF NEURAL ENGINEERING
(2022)
Article
Chemistry, Analytical
Sanjog Vilas Joshi, Sina Sadeghpour, Michael Kraft
Summary: This paper presents a fully addressable 8 x 8 two-dimensional (2D) rigid piezoelectric micromachined ultrasonic transducer (PMUT) array. The PMUTs were fabricated on a standard silicon wafer and the polyimide layer on top of the active piezoelectric layer enables high resonance frequencies that can be easily tuned. The fabricated PMUT showed a 3.2 MHz in-air frequency and an effective coupling coefficient of 14%.
Article
Engineering, Electrical & Electronic
Jingqian Xi, Lei Xu, Yuan Wang, Huafeng Liu, Xingyin Xiong, Xudong Zou, Chengxin Li, Fangjing Hu, Chen Wang, Michael Kraft, Chun Zhao
Summary: This paper presents a multiple-parameter decoupling method for resonant MEMS sensors using blue-sideband excitation. The method successfully separates cross-coupled physical quantities, such as acceleration and temperature, of a single MEMS sensor. The proposed algorithm is applied to two different types of resonant MEMS sensors, achieving significant suppression of external temperature effects and validating its functionality.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2023)
Article
Engineering, Electrical & Electronic
Jan-Willem Burssens, Appo van der Wiel, Michael Kraft
Summary: The literature often lacks the measurement of piezoelectric properties in the processing of these materials. Current methods for characterizing piezoelectric constants on unstructured thin films are limited, and do not include the important lateral piezoelectric coefficient e(31,f). This article introduces a new method to measure the lateral piezoelectric coefficient on unstructured wafers, using wafer bending to generate charge and calculate the piezoelectric constant. The method shows good correlation with the four-point bending method and requires less stringent measurement equipment.
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
(2023)
Review
Energy & Fuels
Hua-Feng Liu, Zhi-Cai Luo, Zhong-Kun Hu, Shan-Qing Yang, Liang-Cheng Tu, Ze-Bing Zhou, Michael Kraft
Summary: MEMS sensors have been widely used in various fields due to their small volume, lightweight, and low cost. This paper analyzes the requirements of high-performance MEMS sensors for prospecting and geophysical applications, and summarizes the current research on MEMS sensors in resource exploration and geophysical applications.
Article
Engineering, Biomedical
Rik J. J. van Daal, Jyh-Jang Sun, Frederik Ceyssens, Frederic Michon, Michael Kraft, Robert Puers, Fabian Kloosterman
JOURNAL OF NEURAL ENGINEERING
(2020)
Article
Engineering, Electrical & Electronic
Kehao Feng, Zhenghua Zhang, Guohua Bai, Xiuyuan Fan, Rongzhi Zhao, Xuefeng Zhang
Summary: This paper proposes a new method to accurately evaluate the high-frequency power loss of soft magnetic materials. Through a two-step calibration, the system is able to compensate for the phase angle discrepancy between the exciting current and induced voltage, enabling a higher power loss measurement frequency.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Mingfang Kang, Tong Liu, Hongmei Sun, Lin Li, Keliang Wang
Summary: In this study, the absorption performance of ambient nitrogenous toxic gases on a monolayer of blue phosphorus phase germanium selenide (GeSe) was investigated using density-functional theory calculations. The results showed that GeSe monolayer exhibits higher sensitivity and selectivity for the hazardous gas NO.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Yaqiong Niu, Zhicheng Zou, Longsheng Cheng, Chaofeng Ye
Summary: This paper proposes a novel method to stabilize the laser diode output using a close-loop control with two feedbacks. The proposed method performs better for long-time operations.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Jiajie Li, Ying Liu, Zhen Chai, Qian Cao, Renjie Li, Yueyang Zhai
Summary: This study proposed an efficient and high-quality beam-splitting method based on a diffractive optical element, enabling multichannel SERF atomic magnetometers to achieve ultra-high consistency and sensitivity. It has significant applications in array biomagnetic measurement systems.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
E. Oliveira, C. Doering, H. Fouckhardt
Summary: With the development of Lab on a chip technology, fluid management using dispersed droplets has become an important approach. Electrowetting on dielectric (EWOD) is one method for droplet actuation, but it requires prior definition of droplet positions. Optoelectrowetting (OEW) goes further by allowing changes in electrical parameters through impinging light spots, without the need for predefined droplet positions. This study re-evaluates the key parameters of OEW and explores their effects on droplet actuation using numerical optimization methods.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Haipeng Wang, Zhiguo Wang, Gancheng Zhu, Shuai Zhang
Summary: A novel capacitive proximity skin was developed to improve the performance of robotics in handling liquid-filled containers. This skin features a flexible structure that can adapt to different grippers and seamlessly integrate with Robot Operating System. Experimental results demonstrated that this proximity skin achieved data-lossless detection and contactless measurement of liquid level, making it suitable for grasping operations.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Tsenguun Byambadorj, Xiangyu Zhao, Yutao Qin, Yogesh B. Gianchandani
Summary: In this research, a monolithically microfabricated Knudsen pump (KP) without suspended membranes was presented. These pumps offer improved mechanical robustness, wider process window, and simplified microfabrication process compared to previous designs. The experimental results matched the modeling results well, indicating the potential for monolithic integration onto complex lab-on-a-chip systems.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Hamed Karami, Saeed Karami Chemeh, Vahid Azizi, Hooman Sharifnasab, Jose Ramos, Mohammed Kamruzzaman
Summary: Aroma is a significant quality trait for pharmaceutical plants and their products, indicating the quality of the raw material. An electronic nose is an efficient approach for identifying and evaluating the aroma of essential oils. In this study, tarragon was dried at different temperatures and air velocities, and the purity of tarragon essential oil was evaluated using an electronic nose. Multivariate data analysis and artificial neural networks modeling were employed to quantify and classify the obtained essential oils.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Xiaoyang Duan, Dan Xu, Wenjun Jia, Ran Li, Bohao Sun, Ruitian Yan, Wenjie Zhao
Summary: Flower-like WO3/WS2 heterojunction materials constructed via a low-temperature in-situ oxidation method exhibit significant improvements in the detection of NO2 gas in gas sensors, along with good selectivity and reproducibility.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Peng Yu, Mengyang Zhang, Manqi You, Yuxi Gao, Landong Xiao, Yan Peng, Jingxia Lai, Zhouzhao Shi, Siwei Luo, Gencai Guo, Gang Guo
Summary: Recent studies have shown that two-dimensional Janus transition metal dichalcogenides (TMDs) have great potential for applications in gas sensors. By conducting first principles calculations, this study explores the potential application of Pd-doped monolayer HfSeS as gas sensor materials for detecting CO, CO2, NH3, and NO. The results demonstrate the good thermodynamical stability and reversible adsorption of these molecules on both pristine and Pd-doped HfSeS, with Pd-doped HfSeS showing higher sensitivity towards NO due to its metallic behavior upon NO adsorption.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Jinlan Yang, Linjiao Li, Jun Huang, Quan Zhang, Hiba Affane
Summary: This study proposes a method for large-scale aggregation of micro-particles by creating a vortex region using low-frequency oscillation. Experimental results show that this method can achieve a large aggregation area and has the advantages of low cost and low power consumption.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Jitendra Singh, Saurabh Kumar Gupta, Vinita
Summary: In this investigation, a Surface Acoustic Wave (SAW) formalin gas sensor was explored for low-level formalin gas sensing applications. The sensor showed stable response and high sensitivity to formalin gas concentration, making it a reliable and useful sensor for room temperature operations.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Junyao Wang, Yahao Liu, Huan Liu, Qi Hou, Jianxin Xu, Hongxu Pan, Jingran Quan, Yansong Chen, Hanbo Yang, Lixiang Li
Summary: A flexible electrode with a serpentine-shaped tetra-chiral structure was designed to improve the mechanical properties and prevent mechanical fracture of flexible electrodes. The research demonstrated that this structure reduced the maximum tensile stress by 87.19% compared to the existing tetra-chiral structure. The flexible electrode remained conductive even at a strain of 70% and showed resistance values of 5 ohm and 4.4 ohm at a bending angle of 180 degrees and after 1000 fold cycles. Furthermore, the flexible electrodes showed great potential in biological signal monitoring, particularly in collecting ECG and pulse signals.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
Taihao Chen, Yong Fang, Mengru Zhu, Zhiwei Zhao, Wei Lei, Zhuoya Zhu, Helong Jiang
Summary: Flexible dual-spectral carbon nanodots/flexible n-silicon heterojunction photodetectors with high responsivity and detectivity are reported. These detectors show photo response in UV illumination and only in forward bias under visible illumination. The photocurrent of the device remains high even under bending strain.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
Article
Engineering, Electrical & Electronic
M. S. Sikandar Bathusha, Israr Ud Din, Rehan Umer, Kamran A. Khan
Summary: Graphene-based nanomaterials are used as embedded sensors to monitor fracture behavior in composite structures. This study investigates the in-situ crack propagation and fracture behavior in a glass fiber reinforced polymer composite using embedded reduced graphene oxide coated fabrics and highly conductive graphene nanoplatelet paper.
SENSORS AND ACTUATORS A-PHYSICAL
(2024)
