A Slot-Structure MEMS Gyroscope Working at Atmosphere With Tunable Electrostatic Spring Constant

Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes

(2012) Erdinc Tatar et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A Sub-0.2$^{\circ}/$hr Bias Drift Micromechanical Silicon Gyroscope With Automatic CMOS Mode-Matching

(2009) Ajit Sharma et al.   IEEE JOURNAL OF SOLID-STATE CIRCUITS

Automatic Mode Matching in MEMS Vibrating Gyroscopes Using Extremum-Seeking Control

(2009) R. Antonello et al.   IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

On the Mode-Matched Control of MEMS Vibratory Gyroscope via Phase-Domain Analysis and Design

(2009) Sangkyung Sung et al.   IEEE-ASME TRANSACTIONS ON MECHATRONICS

Process flow improvement on a bulk micromachined gyroscope

(2009) X. Zheng et al.   Micro & Nano Letters

A closed-form approach for frequency tunable comb resonators with curved finger contour

(2007) Ki Bang Lee et al.   SENSORS AND ACTUATORS A-PHYSICAL