Improvement of bias stability for a micromachined gyroscope based on dynamic electrical balancing of coupling stiffness

Published 2013 View Full Article

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Title
Improvement of bias stability for a micromachined gyroscope based on dynamic electrical balancing of coupling stiffness
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 12, Issue 3, Pages 033008
Publisher
SPIE-Intl Soc Optical Eng
Online
2013-08-03
DOI
10.1117/1.jmm.12.3.033008

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