Article
Optics
Xuan Mao, Hong Yang, Dan Long, Min Wang, Peng-Yu Wen, Yun-Qi Hu, Bo-Yang Wang, Gui-Qin Li, Jian-Cun Gao, Gui-Lu Long
Summary: The mode-matching between conventional optical components and optical mode volumes is crucial for the efficiency of chip-based micro-devices. The Sagnac effect in a millimeter-scale wedged resonator gyroscope is observed and a bidirectional pump and probe scheme is demonstrated. The linear relationship between the detected beat frequency and the rotation velocity is established.
PHOTONICS RESEARCH
(2022)
Article
Engineering, Electrical & Electronic
Jinzhu Zhou, Weijian Zhou, Yue Zhang, Yipeng Wang, Tieying Ma
Summary: Si-based double-layer overlapping open microchannels have been designed and fabricated for microfluidic applications. The top channel has been ingeniously designed in both T-shaped and X-shaped configurations along the <100> direction, while the bottom channel has been prepared along the <110> direction, allowing it to be semi-buried into the top channel at a 45-degree angle. An undercut characteristic of 25% TMAH has been utilized to create a unique overlapping microchannel structure by removing material from the overlapping part of the two layers of channels. This results in intersecting microchannels that are not connected, providing significant structural advantages over traditional single-layer microchannels. With this innovative design, two different substances can be delivered independently and efficiently in the same area.
SENSORS AND ACTUATORS A-PHYSICAL
(2023)
Article
Chemistry, Analytical
Xinyu Wang, Kai Wu, Chengxiang Wang, Qingsong Li, Zhanqiang Hou, Dingbang Xiao, Xuezhong Wu
Summary: This study proposes a mechanical trimming technique to reduce the frequency split of MEMS gyroscopes by adding and removing gold, which shows promising results.
Article
Optics
Shifei Han, Haijuan Yu, Chaojian He, Shusen Zhao, Chaoyu Ning, Lu Jiang, Xunchun Lin
Summary: This study demonstrates the successful fabrication of silicon carbide wafers using laser cutting technology, which overcomes the issues encountered in diamond wire cutting. By optimizing the processing parameters, the fabricated wafers have a small cutting width and surface roughness, with no residual stress. This technology has important applications in slicing hard and brittle materials and thinning the backsides of semiconductor devices.
OPTICS AND LASER TECHNOLOGY
(2022)
Article
Nanoscience & Nanotechnology
Jiangkun Sun, Sheng Yu, Yongmeng Zhang, Qingsong Li, Xiang Xi, Kun Lu, Xuezhong Wu, Dingbang Xiao
Summary: This paper presents a novel real-time calibration method for capacitive displacement detection in whole-angle gyroscopes. By utilizing the harmonic components of detective signals for calibration, the method effectively improves the performance of MEMS whole-angle gyroscopes, reducing angle drift and increasing scale-factor nonlinearity to the best reported levels. The innovative calibration method shows promise in addressing traditional issues and achieving significant performance enhancements.
MICROSYSTEMS & NANOENGINEERING
(2021)
Article
Chemistry, Analytical
Yipeng Wang, Weijian Zhou, Tieying Ma
Summary: A four-step etching method was used to prepare a double-layer cross Si microchannel structure, with the morphology of the channels being controlled by varying the direction and time of etching. The double-layer crossed microchannels have potential applications in microfluidic technology and microchannel heat dissipation technology.
Article
Chemistry, Physical
Robert Heinke, Martin Ehrhardt, Jens Bauer, Andriy Lotnyk, Pierre Lorenz, Roy Morgenstern, Thomas Lampke, Thomas Arnold, Klaus Zimmer
Summary: Precise surface machining of silicon using pulsed laser processing is challenging due to the modifications caused by laser ablation. In order to meet the increasing demand for precisely structured silicon surfaces in various fields, a new laser-based ultra-precise surface machining technique called laser-induced plasma etching process (LIPE) was studied. The LIPE process showed no melting or structural defects and minimal chemical contamination, making it a promising method for achieving ultra-precise surface machining of silicon.
APPLIED SURFACE SCIENCE
(2022)
Article
Engineering, Electrical & Electronic
Hamza Abdelli, Takashiro Tsukamoto, Shuji Tanaka
Summary: A novel quality factor trimming method for a 2-axis mode-matched resonator using thermoelastic dissipation was reported in this paper. The trimming method achieved a significant improvement in Q-factor while maintaining the resonant frequencies stable.
SENSORS AND ACTUATORS A-PHYSICAL
(2021)
Article
Electrochemistry
B. Hamelin, J. Yang, F. Ayazi
Summary: Integrated mechanical resonators made in high acoustic velocity materials with high quality factors (Q) are crucial for various applications. Silicon is commonly used for MEMS resonators, but SiC has low phononic dissipation. This paper presents the latest developments in precision DRIE of monocrystalline SiC-on-Insulator substrates to leverage the mechanical properties of SiC, achieving Q products beyond 1 x 10^14 Hz. Surface roughness impact on dissipation and etching of mirror-polished trenches in SiCOI substrates are discussed, aiming for monocrystalline SiC resonators with Qs beyond 100 million.
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
(2021)
Article
Materials Science, Ceramics
Lukang Wang, You Zhao, Zixuan Yang, Yulong Zhao, Xinwan Yang, Taobo Gong, Cun Li
Summary: Utilizing a Yb:KGW femtosecond laser to fabricate 4H-SiC sensor membranes has shown potential in achieving high size accuracy and steep sidewalls, with wet cleaning and ICP etching playing a significant role in improving membrane surface morphology. Energy-Dispersive X-ray Spectroscopy and Raman spectrum analysis confirmed that the crystal properties of the membrane bottom and thin epitaxial layers on the front side were not damaged by the micromachining process.
CERAMICS INTERNATIONAL
(2021)
Article
Engineering, Electrical & Electronic
Arpan Sinha, Mool C. Gupta
Summary: The paper introduces a laser heating-induced chemical etching method for patterning crystalline silicon, which can achieve microscale patterning on silicon substrates and eliminate laser-induced damage. By studying the laser processing parameters, the optimization and understanding of the LHICE process can be achieved.
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
(2021)
Article
Chemistry, Analytical
Jun-Lin Zhang, Shuang Liao, Cheng Chen, Xiu-Tao Yang, Sheng-Ao Lin, Feng Tan, Bing Li, Wen-Wu Wang, Zheng-Xiang Zhong, Guang-Gen Zeng
Summary: A quartz crystal resonator is a crucial electronic component in the modern electronics industry. Laser thinning of the electrode can achieve satisfactory frequency trimming results, but etching the surface electrode into through-holes may lead to attenuation of the equivalent parameters, causing some resonators to no longer vibrate.
Article
Engineering, Electrical & Electronic
Rang Cui, Ke Li, Xin Xu, Rihui Xue, Chong Shen, Yunbo Shi, Huiliang Cao
Summary: This article introduces a novel gyroscope quadrature error correction system based on quadrature force correction. The source of quadrature error in MEMS solid-state wave gyroscope is analyzed, which is mainly caused by machining errors. The gyroscope system model is established, and a quadrature error correction method is proposed and simulated. The gyroscope with the quadrature error correction system shows improved performance in a comparative test.
IEEE SENSORS JOURNAL
(2023)
Article
Engineering, Electrical & Electronic
S. Purohit, V Swarnalatha, A. K. Pandey, R. K. Sharma, P. Pal
Summary: This research investigates the etching characteristics of Si{110} in 10 M sodium hydroxide with and without the addition of hydroxylamine (NH2OH). The incorporation of NH2OH significantly improves the etch rate and the corner undercutting. The findings are useful for scientists and engineers in the fabrication of MEMS structures using wet anisotropic etching and have the potential to promote the application of wet etching in MEMS.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
(2022)
Article
Nanoscience & Nanotechnology
Zhendong Xu, Yingchun Zhang, Guodong Xu
Summary: This paper introduces a complementary frequency electromagnetic gyroscope and establishes a mathematical model, which is verified by simulation analysis to demonstrate its accuracy and stability in measuring angular rate. This gyroscope can achieve miniaturization and has promising application prospects.
Article
Optics
Xiaoguang Zhao, Chunxu Chen, Aobo Li, Guangwu Duan, Xin Zhang
Article
Nanoscience & Nanotechnology
David Veysset, Steven E. Kooi, Ryadh Haferssas, Mostafa Hassani-Gangaraj, Mohammad Islam, A. A. Maznev, Yevheniia Chernukha, Xiaoguang Zhao, Keiichi Nakagawa, Dmitro Martynowych, Xin Zhang, Alexey M. Lomonosov, Christopher A. Schuh, Raul Radovitzky, Thomas Pezeril, Keith A. Nelson
SCRIPTA MATERIALIA
(2019)
Article
Chemistry, Multidisciplinary
Aobo Li, Xiaoguang Zhao, Guangwu Duan, Stephan Anderson, Xin Zhang
ADVANCED FUNCTIONAL MATERIALS
(2019)
Review
Engineering, Electrical & Electronic
Guangwu Duan, Jacob Schalch, Xiaoguang Zhao, Aobo Li, Chunxu Chen, Richard D. Averitt, Xin Zhang
SENSORS AND ACTUATORS A-PHYSICAL
(2019)
Article
Optics
Ziheng Yao, Vyacheslav Semenenko, Jiawei Zhang, Scott Mills, Xiaoguang Zhao, Xinzhong Chen, Hai Hu, Ryan Mescall, Thomas Ciavatti, Stephen March, Seth R. Bank, Tiger H. Tao, Xin Zhang, Vasili Perebeinos, Qing Dai, Xu Du, Mengkun Liu
Article
Materials Science, Multidisciplinary
Jacob S. Schalch, Kirk Post, Guangwu Duan, Xiaoguang Zhao, Young Duck Kim, James Hone, Michael M. Fogler, Xin Zhang, Dmitri N. Basov, Richard D. Averitt
ADVANCED OPTICAL MATERIALS
(2019)
Article
Chemistry, Multidisciplinary
Xiaoguang Zhao, Guangwu Duan, Ke Wu, Stephan W. Anderson, Xin Zhang
ADVANCED MATERIALS
(2019)
Article
Optics
Chunxu Chen, Yuwei Huang, Ke Wu, Thomas G. Bifano, Stephan W. Anderson, Xiaoguang Zhao, Xin Zhang
Article
Optics
Xiaoguang Zhao, Chunxu Chen, Kelson Kaj, Ian Hammock, Yuwei Huang, Richard D. Averitt, Xin Zhang
Article
Engineering, Electrical & Electronic
Zijian Cui, Yue Wang, Lisha Yue, Xiaoguang Zhao, Dachi Zhang, Zhenyu Yao, Xiaoju Zhang, Lei Hou, Xin Zhang
Summary: A strong absorption coupling effect between the SSPP modes and the intrinsic modes in a novel terahertz metamaterial has been investigated, showing a splitting phenomenon that can be controlled by directionally varying the lattice constant. This coupling process mediated by the SSPP mode can lead to resonances with ultra-high quality factors, offering potential applications in sensing and detection.
IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY
(2021)
Article
Optics
Chunxu Chen, Kelson Kaj, Xiaoguang Zhao, Yuwei Huang, Richard Averitt, Xin Zhang
Summary: Metasurfaces have shown great potential in controlling electromagnetic waves using arrays of subwavelength resonators. In this study, a mechanically reconfigurable metasurface based on a microelectromechanical system (MEMS) is presented for dynamic surface wave switching at terahertz frequencies. The metasurface allows for efficient conversion between plane waves and surface waves with a wide working bandwidth. This technology has applications in spatial light modulation, beam steering, focusing, and beam combining for future communication systems.
Article
Nanoscience & Nanotechnology
Ke Wu, Guangwu Duan, Xiaoguang Zhao, Chunxu Chen, Stephan William Anderson, Xin Zhang
Summary: RFID technology is widely used in industrial applications for tracking and tracing products, assets, and material flows. The trend towards miniaturized RFID sensor tags continues to advance, but presents challenges for communication coverage area. Recent efforts have focused on using metamaterials to increase power transfer efficiency in RFID systems. Applying magnetic metamaterials and local field enhancement package to near-field RFID technology offers high power transfer efficiency and larger communication coverage area, creating new opportunities in the emerging Internet of Things era.
MICROSYSTEMS & NANOENGINEERING
(2022)
Article
Materials Science, Multidisciplinary
Xiaoguang Zhao, Jingdi Zhang, Kebin Fan, Guangwu Duan, Jacob Schalch, George R. Keiser, Richard D. Averitt, X. Zhang
Article
Chemistry, Multidisciplinary
Yanru Xu, Xiaoguang Zhao, Aobo Li, Yanan Yue, Jin Jiang, Xin Zhang
Article
Physics, Multidisciplinary
Guangwu Duan, Xiaoguang Zhao, Stephan William Anderson, Xin Zhang
COMMUNICATIONS PHYSICS
(2019)
