Electron Beam-Induced Deposition for Atom Probe Tomography Specimen Capping Layers
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Title
Electron Beam-Induced Deposition for Atom Probe Tomography Specimen Capping Layers
Authors
Keywords
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Journal
MICROSCOPY AND MICROANALYSIS
Volume 23, Issue 02, Pages 321-328
Publisher
Cambridge University Press (CUP)
Online
2016-10-17
DOI
10.1017/s1431927616011740
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