3-D analysis of semiconductor dopant distributions in a patterned structure using LEAP

Title
3-D analysis of semiconductor dopant distributions in a patterned structure using LEAP
Authors
Keywords
-
Journal
ULTRAMICROSCOPY
Volume 108, Issue 6, Pages 536-539
Publisher
Elsevier BV
Online
2007-08-31
DOI
10.1016/j.ultramic.2007.08.008

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