Study of vertical Si/SiO2 interface using laser-assisted atom probe tomography and transmission electron microscopy

Published 2013 View Full Article

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Title
Study of vertical Si/SiO2 interface using laser-assisted atom probe tomography and transmission electron microscopy
Authors
Keywords
-
Journal
MICRON
Volume 58, Issue -, Pages 32-37
Publisher
Elsevier BV
Online
2013-11-25
DOI
10.1016/j.micron.2013.11.003

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