Wafer-Scale Growth of Sb2Te3 Films via Low-Temperature Atomic Layer Deposition for Self-Powered Photodetectors
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Title
Wafer-Scale Growth of Sb2Te3 Films via Low-Temperature Atomic Layer Deposition for Self-Powered Photodetectors
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 14, Issue 48, Pages 54034-54043
Publisher
American Chemical Society (ACS)
Online
2022-11-16
DOI
10.1021/acsami.2c16150
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