Wafer-Scale Growth of Sb2Te3 Films via Low-Temperature Atomic Layer Deposition for Self-Powered Photodetectors
出版年份 2022 全文链接
标题
Wafer-Scale Growth of Sb2Te3 Films via Low-Temperature Atomic Layer Deposition for Self-Powered Photodetectors
作者
关键词
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出版物
ACS Applied Materials & Interfaces
Volume 14, Issue 48, Pages 54034-54043
出版商
American Chemical Society (ACS)
发表日期
2022-11-16
DOI
10.1021/acsami.2c16150
参考文献
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