Tunable sensitivity of zirconium oxynitride thin-film temperature sensor modulated by film thickness
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Title
Tunable sensitivity of zirconium oxynitride thin-film temperature sensor modulated by film thickness
Authors
Keywords
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Journal
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 33, Issue 26, Pages 20940-20952
Publisher
Springer Science and Business Media LLC
Online
2022-08-27
DOI
10.1007/s10854-022-08900-8
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