Effects of sputtering pressure on microstructure and mechanical properties of ZrN films deposited by magnetron sputtering

Published 2018 View Full Article

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Title
Effects of sputtering pressure on microstructure and mechanical properties of ZrN films deposited by magnetron sputtering
Authors
Keywords
-
Journal
MATERIALS RESEARCH BULLETIN
Volume 105, Issue -, Pages 231-236
Publisher
Elsevier BV
Online
2018-05-04
DOI
10.1016/j.materresbull.2018.04.054

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