Structural, optical and hydrophobic properties of sputter deposited zirconium oxynitride films

Published 2010 View Full Article

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Title
Structural, optical and hydrophobic properties of sputter deposited zirconium oxynitride films
Authors
Keywords
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Journal
Materials Science and Engineering B-Advanced Functional Solid-State Materials
Volume 172, Issue 3, Pages 259-266
Publisher
Elsevier BV
Online
2010-06-05
DOI
10.1016/j.mseb.2010.05.027

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