Fabrication of Sub-5 nm Nanochannels in Insulating Substrates Using Focused Ion Beam Milling

Published 2010 View Full Article

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Title
Fabrication of Sub-5 nm Nanochannels in Insulating Substrates Using Focused Ion Beam Milling
Authors
Keywords
-
Journal
NANO LETTERS
Volume 11, Issue 2, Pages 512-517
Publisher
American Chemical Society (ACS)
Online
2010-12-21
DOI
10.1021/nl103369g

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