X-ray Photoelectron Spectroscopy Study of Indium Tin Oxide Films Deposited at Various Oxygen Partial Pressures
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Title
X-ray Photoelectron Spectroscopy Study of Indium Tin Oxide Films Deposited at Various Oxygen Partial Pressures
Authors
Keywords
ITO, magnetron sputtering, XPS, oxygen vacancy concentration, carrier concentration
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 46, Issue 2, Pages 1405-1412
Publisher
Springer Nature
Online
2016-11-29
DOI
10.1007/s11664-016-5136-7
References
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