Comparison of the large-area reactive sputter processes of ZnO:Al and ITO using industrial size rotatable targets

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Title
Comparison of the large-area reactive sputter processes of ZnO:Al and ITO using industrial size rotatable targets
Authors
Keywords
Reactive magnetron sputtering, ITO, ZnO:Al, Tube target, Optical emission spectroscopy, Hysteresis
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 290, Issue -, Pages 43-57
Publisher
Elsevier BV
Online
2015-10-23
DOI
10.1016/j.surfcoat.2015.09.051

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