Pillar-structured 3D inlets fabricated by dose-modulated e-beam lithography and nanoimprinting for DNA analysis in passive, clogging-free, nanofluidic devices
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Title
Pillar-structured 3D inlets fabricated by dose-modulated e-beam lithography and nanoimprinting for DNA analysis in passive, clogging-free, nanofluidic devices
Authors
Keywords
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Journal
NANOTECHNOLOGY
Volume 33, Issue 38, Pages 385301
Publisher
IOP Publishing
Online
2022-06-14
DOI
10.1088/1361-6528/ac780d
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