Fabrication of Complex 3D Nanoimprint Mold by Using Acceleration Voltage Electron Beam Lithography

Published 2018 View Full Article

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Title
Fabrication of Complex 3D Nanoimprint Mold by Using Acceleration Voltage Electron Beam Lithography
Authors
Keywords
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Journal
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
Volume 31, Issue 2, Pages 271-276
Publisher
Technical Association of Photopolymers, Japan
Online
2018-09-05
DOI
10.2494/photopolymer.31.271

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