Lithography-based fabrication of nanopore arrays in freestanding SiN and graphene membranes

Published 2018 View Full Article

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Title
Lithography-based fabrication of nanopore arrays in freestanding SiN and graphene membranes
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 29, Issue 14, Pages 145302
Publisher
IOP Publishing
Online
2018-01-31
DOI
10.1088/1361-6528/aaabce

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