Stability enhancement of the nitrogen-doped ITO thin films at high temperatures using two-step mixed atmosphere annealing technique

Title
Stability enhancement of the nitrogen-doped ITO thin films at high temperatures using two-step mixed atmosphere annealing technique
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 594, Issue -, Pages 153508
Publisher
Elsevier BV
Online
2022-04-28
DOI
10.1016/j.apsusc.2022.153508

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