Effect of thermally grown Al2O3 on electrical insulation properties of thin film sensors for high temperature environments
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Title
Effect of thermally grown Al2O3 on electrical insulation properties of thin film sensors for high temperature environments
Authors
Keywords
Thermally grown, High temperature oxidation, Insulation properties, Thin film sensor, Buffer layer
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 331, Issue -, Pages 113033
Publisher
Elsevier BV
Online
2021-08-14
DOI
10.1016/j.sna.2021.113033
References
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