Effect of nitrogen partial pressure on the TCR of magnetron sputtered indium tin oxide thin films at high temperatures

Title
Effect of nitrogen partial pressure on the TCR of magnetron sputtered indium tin oxide thin films at high temperatures
Authors
Keywords
Nitrogen partial pressure, ITO, TCR, High temperature
Journal
CERAMICS INTERNATIONAL
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2022-01-20
DOI
10.1016/j.ceramint.2022.01.165

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