Micromachined Thermopile Based High Heat Flux Sensor

Title
Micromachined Thermopile Based High Heat Flux Sensor
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 29, Issue 1, Pages 36-42
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2019-11-22
DOI
10.1109/jmems.2019.2948645

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