Design, fabrication and characterization of high temperature thin film heat flux sensors

Title
Design, fabrication and characterization of high temperature thin film heat flux sensors
Authors
Keywords
TFTPs, Heat flux, Simulation, Sensitivity, Thermal insulator
Journal
MICROELECTRONIC ENGINEERING
Volume 217, Issue -, Pages 111128
Publisher
Elsevier BV
Online
2019-08-21
DOI
10.1016/j.mee.2019.111128

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