Silicon nitride passive and active photonic integrated circuits: trends and prospects

Optically reconfigurable quasi-phase-matching in silicon nitride microresonators

(2022) Edgars Nitiss et al.   Nature Photonics

Integrated optical frequency comb technologies

(2022) Lin Chang et al.   Nature Photonics

Ultra-low 0.034 dB/m loss wafer-scale integrated photonics realizing 720 million Q and 380 μW threshold Brillouin lasing

(2022) Daniel Blumenthal et al.   OPTICS LETTERS

Heterogeneous integration of Si photodiodes on silicon nitride for near-visible light detection

(2022) Stijn Cuyvers et al.   OPTICS LETTERS

Efficient Kerr soliton comb generation in micro-resonator with interferometric back-coupling

(2022) J. M. Chavez Boggio et al.   Nature Communications

Dissipative solitons in photonic molecules

(2021) Óskar B. Helgason et al.   Nature Photonics

Dynamics of soliton self-injection locking in optical microresonators

(2021) Andrey S. Voloshin et al.   Nature Communications

Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high-Q microresonators

(2021) Warren Jin et al.   Nature Photonics

Photonics for artificial intelligence and neuromorphic computing

(2021) Bhavin J. Shastri et al.   Nature Photonics

Silicon nitride PIC-based multi-color laser engines for life science applications

(2021) Alireza Tabatabaei Mashayekh et al.   OPTICS EXPRESS

Silicon nitride programmable photonic processor with folded heaters

(2021) Daniel Pérez-López et al.   OPTICS EXPRESS

Silicon nitride assisted 1×64 optical phased array based on SOI platform

(2021) Qing Wang et al.   OPTICS EXPRESS

422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth

(2021) Matthew W. Puckett et al.   Nature Communications

Robust hybrid laser linewidth reduction using Si3N4-based subwavelength hole defect assisted microring reflector

(2021) Minghua Chen et al.   Photonics Research

Hybrid InP and SiN integration of an octave-spanning frequency comb

(2021) Travis C. Briles et al.   APL Photonics

High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits

(2021) Junqiu Liu et al.   Nature Communications

Biophotonic sensors with integrated Si3N4-organic hybrid (SiNOH) lasers for point-of-care diagnostics

(2021) Daria Kohler et al.   Light-Science & Applications

Photonic chip-based resonant supercontinuum

(2021) Miles Anderson et al.   Optica

High-temperature reliable quantum-dot lasers on Si with misfit and threading dislocation filters

(2021) Chen Shang et al.   Optica

CMOS-foundry-based blue and violet photonics

(2021) Theodore J. Morin et al.   Optica

Perspective on the future of silicon photonics and electronics

(2021) Near Margalit et al.   APPLIED PHYSICS LETTERS

Review of Silicon Photonics Technology and Platform Development

(2021) S. Y. Siew et al.   JOURNAL OF LIGHTWAVE TECHNOLOGY

Low Noise Heterogeneous III‐V‐on‐Silicon‐Nitride Mode‐Locked Comb Laser

(2021) Stijn Cuyvers et al.   Laser & Photonics Reviews

Investigation and demonstration of a high-power handling and large-range steering optical phased array chip

(2021) Lanxuan Zhang et al.   OPTICS EXPRESS

Seamless multi-reticle photonics

(2021) Warren Jin et al.   OPTICS LETTERS

Laser soliton microcombs heterogeneously integrated on silicon

(2021) Chao Xiang et al.   SCIENCE

Visible light photonic integrated Brillouin laser

(2021) Nitesh Chauhan et al.   Nature Communications

Towards integrated photonic interposers for processing octave-spanning microresonator frequency combs

(2021) Ashutosh Rao et al.   Light-Science & Applications

Perspectives on Advances in Quantum Dot Lasers and Integration with Si Photonic Integrated Circuits

(2021) Chen Shang et al.   ACS Photonics

Hybrid integrated low-noise linear chirp frequency-modulated continuous-wave laser source based on self-injection to an external cavity

(2021) Liwei Tang et al.   Photonics Research

Overcoming the quantum limit of optical amplification in monolithic waveguides

(2021) Zhichao Ye et al.   Science Advances

Methods to achieve ultra-high quality factor silicon nitride resonators

(2021) Xingchen Ji et al.   APL Photonics

High-speed programmable photonic circuits in a cryogenically compatible, visible–near-infrared 200 mm CMOS architecture

(2021) Mark Dong et al.   Nature Photonics

Reaching fiber-laser coherence in integrated photonics

(2021) Bohan Li et al.   OPTICS LETTERS

High-performance lasers for fully integrated silicon nitride photonics

(2021) Chao Xiang et al.   Nature Communications

Enabling VCSEL-on-silicon nitride photonic integrated circuits with micro-transfer-printing

(2021) Jeroen Goyvaerts et al.   Optica

Wide-steering-angle high-resolution optical phased array

(2021) Yingzhi Li et al.   Photonics Research

High-Performance Silicon Photonics Using Heterogeneous Integration

(2021) Chao Xiang et al.   IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

A heterogeneously integrated silicon photonic/lithium niobate travelling wave electro-optic modulator

(2020) Nicholas Boynton et al.   OPTICS EXPRESS

Chip-based soliton microcomb module using a hybrid semiconductor laser

(2020) Arslan S. Raja et al.   OPTICS EXPRESS

Chip-scale Blue Light Phased Array

(2020) Min Chul Shin et al.   OPTICS LETTERS

Observation of Stimulated Brillouin Scattering in Silicon Nitride Integrated Waveguides

(2020) Flavien Gyger et al.   PHYSICAL REVIEW LETTERS

Photonic integration for UV to IR applications

(2020) Daniel J. Blumenthal   APL Photonics

Photonic microwave generation in the X- and K-band using integrated soliton microcombs

(2020) Junqiu Liu et al.   Nature Photonics

Heterogeneous photodiodes on silicon nitride waveguides

(2020) Qianhuan Yu et al.   OPTICS EXPRESS

Deuterated Silicon Dioxide for HeterogeneousIntegration of Ultra Low-Loss Waveguides

(2020) Warren Jin et al.   OPTICS LETTERS

Heterogeneous silicon nitride photonics

(2020) Hyundai Park et al.   Optica

Heterogeneous III-V on silicon nitride amplifiers and lasers via microtransfer printing

(2020) Camiel Op de Beeck et al.   Optica

Integrated turnkey soliton microcombs

(2020) Boqiang Shen et al.   NATURE

Monolithic piezoelectric control of soliton microcombs

(2020) Junqiu Liu et al.   NATURE

Effects of nonlinear loss in high-Q Si ring resonators for narrow-linewidth III-V/Si heterogeneously integrated tunable lasers

(2020) Chao Xiang et al.   OPTICS EXPRESS

Hybrid integrated InP-Si3N4 diode laser with a 40-Hz intrinsic linewidth

(2020) Youwen Fan et al.   OPTICS EXPRESS

Programmable photonic circuits

(2020) Wim Bogaerts et al.   NATURE

On-chip optical parametric oscillation into the visible: generating red, orange, yellow, and green from a near-infrared pump

(2020) Xiyuan Lu et al.   Optica

Silicon nitride chirped spiral Bragg grating with large group delay

(2020) Zhenmin Du et al.   APL Photonics

Integrated microwave photonics

(2019) David Marpaung et al.   Nature Photonics

A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications

(2019) Quentin Wilmart et al.   Applied Sciences-Basel

Electrically pumped photonic integrated soliton microcomb

(2019) Arslan S. Raja et al.   Nature Communications

Photonic-chip-based frequency combs

(2019) Alexander L. Gaeta et al.   Nature Photonics

Architecture for the photonic integration of an optical atomic clock

(2019) Zachary L. Newman et al.   Optica

Ultra-narrow linewidth laser based on a semiconductor gain chip and extended Si3N4 Bragg grating

(2019) Chao Xiang et al.   OPTICS LETTERS

Foundry Developments Toward Silicon Nitride Photonics From Visible to the Mid-Infrared

(2019) Pascual Munoz et al.   IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

Open-Access Silicon Photonics Platforms in Europe

(2019) Abdul Rahim et al.   IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

8×8 reconfigurable quantum photonic processor based on silicon nitride waveguides

(2019) Caterina Taballione et al.   OPTICS EXPRESS

Integrated photonic quantum technologies

(2019) Jianwei Wang et al.   Nature Photonics

Ultralow-loss tightly confining Si3N4 waveguides and high-Q microresonators

(2019) Houssein El Dirani et al.   OPTICS EXPRESS

High-Q Si3N4 microresonators based on a subtractive processing for Kerr nonlinear optics

(2019) Zhichao Ye et al.   OPTICS EXPRESS

Tutorial on narrow linewidth tunable semiconductor lasers using Si/III-V heterogeneous integration

(2019) Minh A. Tran et al.   APL Photonics

Ring-Resonator Based Widely-Tunable Narrow-Linewidth Si/InP Integrated Lasers

(2019) Minh A. Tran et al.   IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers

(2019) Wesley D. Sacher et al.   OPTICS EXPRESS

Narrow-linewidth III-V/Si/Si3N4 laser using multilayer heterogeneous integration

(2019) Chao Xiang et al.   Optica

Low-Loss Continuously Tunable Optical True Time Delay Based on Si3N4 Ring Resonators

(2018) Chao Xiang et al.   IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

Integrated Resonators in an Ultralow Loss Si3N4/SiO2 Platform for Multifunction Applications

(2018) Taran Arthur Huffman et al.   IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview

(2018) Chris G. H. Roeloffzen et al.   IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

Photonic Integration with Epitaxial III-V on Silicon

(2018) Alan Young Liu et al.   IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

High-Power, Ultra-Low Noise Hybrid Lasers for Microwave Photonics and Optical Sensing

(2018) Paul Adrian Morton et al.   JOURNAL OF LIGHTWAVE TECHNOLOGY

Micro-Resonator Soliton Generated Directly with a Diode Laser

(2018) Nicolas Volet et al.   Laser & Photonics Reviews

Mid-infrared frequency comb via coherent dispersive wave generation in silicon nitride nanophotonic waveguides

(2018) Hairun Guo et al.   Nature Photonics

Phase tuning by length contraction

(2018) Warren Jin et al.   OPTICS EXPRESS

Deuterated silicon nitride photonic devices for broadband optical frequency comb generation

(2018) Jeff Chiles et al.   OPTICS LETTERS

Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins

(2018) Martin H. P. Pfeiffer et al.   Optica

Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature

(2018) Shiqi Tao et al.   Photonics Research

Tunable mid-infrared generation via wide-band four-wave mixing in silicon nitride waveguides

(2018) Abijith S. Kowligy et al.   OPTICS LETTERS

Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices

(2018) Wesley D. Sacher et al.   PROCEEDINGS OF THE IEEE

Silicon Nitride in Silicon Photonics

(2018) Daniel J. Blumenthal et al.   PROCEEDINGS OF THE IEEE

Dissipative Kerr solitons in optical microresonators

(2018) Tobias J. Kippenberg et al.   SCIENCE

Nanophotonic Pockels modulators on a silicon nitride platform

(2018) Koen Alexander et al.   Nature Communications

Battery-operated integrated frequency comb generator

(2018) Brian Stern et al.   NATURE

Narrow-linewidth lasing and soliton Kerr microcombs with ordinary laser diodes

(2018) N. G. Pavlov et al.   Nature Photonics

Sub-hertz fundamental linewidth photonic integrated Brillouin laser

(2018) Sarat Gundavarapu et al.   Nature Photonics

Open-Access Silicon Photonics: Current Status and Emerging Initiatives

(2018) Abdul Rahim et al.   PROCEEDINGS OF THE IEEE

Ultralow-power chip-based soliton microcombs for photonic integration

(2018) Junqiu Liu et al.   Optica

Expanding the Silicon Photonics Portfolio With Silicon Nitride Photonic Integrated Circuits

(2017) Abdul Rahim et al.   JOURNAL OF LIGHTWAVE TECHNOLOGY

Self-injection locking of a laser diode to a high-Q WGM microresonator

(2017) N. M. Kondratiev et al.   OPTICS EXPRESS

Compact narrow-linewidth integrated laser based on a low-loss silicon nitride ring resonator

(2017) Brian Stern et al.   OPTICS LETTERS

Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications

(2017) Pascual Muñoz et al.   SENSORS

Octave-spanning dissipative Kerr soliton frequency combs in Si_3N_4 microresonators

(2017) Martin H. P. Pfeiffer et al.   Optica

Ultra-low-loss on-chip resonators with sub-milliwatt parametric oscillation threshold

(2017) Xingchen Ji et al.   Optica

Large-scale silicon nitride nanophotonic phased arrays at infrared and visible wavelengths

(2016) Christopher V. Poulton et al.   OPTICS LETTERS

Photonic Damascene process for integrated high-Q microresonator based nonlinear photonics

(2016) Martin H. P. Pfeiffer et al.   Optica

Monolithically Integrated High- $Q$ Rings for Narrow Linewidth Widely Tunable Lasers

(2015) Tin Komljenovic et al.   IEEE JOURNAL OF QUANTUM ELECTRONICS

Silicon Photonic Hybrid Ring-Filter External Cavity Wavelength Tunable Lasers

(2015) Naoki Kobayashi et al.   JOURNAL OF LIGHTWAVE TECHNOLOGY

Optical and Electronic Packaging Processes for Silicon Photonic Systems

(2015) Nicola Pavarelli et al.   JOURNAL OF LIGHTWAVE TECHNOLOGY

Mode-locked dark pulse Kerr combs in normal-dispersion microresonators

(2015) Xiaoxiao Xue et al.   Nature Photonics

Multi-octave spectral beam combiner on ultra-broadband photonic integrated circuit platform

(2015) Eric J. Stanton et al.   OPTICS EXPRESS

Visible-to-near-infrared octave spanning supercontinuum generation in a silicon nitride waveguide

(2015) Haolan Zhao et al.   OPTICS LETTERS

Octave-spanning coherent supercontinuum generation in a silicon nitride waveguide

(2015) Adrea R. Johnson et al.   OPTICS LETTERS

Photonic chip-based optical frequency comb using soliton Cherenkov radiation

(2015) V. Brasch et al.   SCIENCE

Ultralow noise miniature external cavity semiconductor laser

(2015) W. Liang et al.   Nature Communications

Programmable photonic signal processor chip for radiofrequency applications

(2015) Leimeng Zhuang et al.   Optica

Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited]

(2015) Ananth Z. Subramanian et al.   Photonics Research

Integrated waveguide coupled Si_3N_4 resonators in the ultrahigh-Q regime

(2014) Daryl T. Spencer et al.   Optica

Integrated Ultra-Low-Loss 4-Bit Tunable Delay for Broadband Phased Array Antenna Applications

(2013) Renan L. Moreira et al.   IEEE PHOTONICS TECHNOLOGY LETTERS

Low-Loss Silicon Nitride AWG Demultiplexer Heterogeneously Integrated With Hybrid III–V/Silicon Photodetectors

(2013) Molly Piels et al.   JOURNAL OF LIGHTWAVE TECHNOLOGY

New CMOS-compatible platforms based on silicon nitride and Hydex for nonlinear optics

(2013) David J. Moss et al.   Nature Photonics

Temporal solitons in optical microresonators

(2013) T. Herr et al.   Nature Photonics

Silicon nitride microwave photonic circuits

(2013) Chris G. H. Roeloffzen et al.   OPTICS EXPRESS

Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths

(2013) Sebastian Romero-García et al.   OPTICS EXPRESS

Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform

(2013) Qing Li et al.   OPTICS EXPRESS

Patterning by controlled cracking

(2012) Koo Hyun Nam et al.   NATURE

Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction

(2012) Daoxin Dai et al.   Light-Science & Applications

Planar waveguides with less than 01 dB/m propagation loss fabricated with wafer bonding

(2011) Jared F. Bauters et al.   OPTICS EXPRESS

Low-loss, high-index-contrast Si_3N_4/SiO_2 optical waveguides for optical delay lines in microwave photonics signal processing

(2011) Leimeng Zhuang et al.   OPTICS EXPRESS

Ultra-low-loss high-aspect-ratio Si_3N_4 waveguides

(2011) Jared F. Bauters et al.   OPTICS EXPRESS

Low-loss Si_3N_4 arrayed-waveguide grating (de)multiplexer using nano-core optical waveguides

(2011) Daoxin Dai et al.   OPTICS EXPRESS

Normal group-velocity dispersion Kerr frequency comb

(2011) A. B. Matsko et al.   OPTICS LETTERS

Microresonator-Based Optical Frequency Combs

(2011) T. J. Kippenberg et al.   SCIENCE

Recent Progress in Brillouin Scattering Based Fiber Sensors

(2011) Xiaoyi Bao et al.   SENSORS

Silicon optical modulators

(2010) G. T. Reed et al.   Nature Photonics

Whispering-gallery-mode-resonator-based ultranarrow linewidth external-cavity semiconductor laser

(2010) W. Liang et al.   OPTICS LETTERS

CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects

(2009) Jacob S. Levy et al.   Nature Photonics