Photonic Damascene process for integrated high-Q microresonator based nonlinear photonics

Published 2016 View Full Article

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Title
Photonic Damascene process for integrated high-Q microresonator based nonlinear photonics
Authors
Keywords
-
Journal
Optica
Volume 3, Issue 1, Pages 20
Publisher
The Optical Society
Online
2016-01-06
DOI
10.1364/optica.3.000020

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