Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform
Published 2013 View Full Article
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Title
Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform
Authors
Keywords
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Journal
OPTICS EXPRESS
Volume 21, Issue 15, Pages 18236
Publisher
The Optical Society
Online
2013-07-23
DOI
10.1364/oe.21.018236
References
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