Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins

Published 2018 View Full Article

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Title
Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins
Authors
Keywords
-
Journal
Optica
Volume 5, Issue 7, Pages 884
Publisher
The Optical Society
Online
2018-07-19
DOI
10.1364/optica.5.000884

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