Numerical and experimental investigation on ductile deformation and subsurface defects of monocrystalline silicon during nano-scratching

Published 2020 View Full Article

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Title
Numerical and experimental investigation on ductile deformation and subsurface defects of monocrystalline silicon during nano-scratching
Authors
Keywords
Silicon, Nano-scratching, Ductile deformation, Subsurface defect, Molecular dynamic
Journal
APPLIED SURFACE SCIENCE
Volume 528, Issue -, Pages 147034
Publisher
Elsevier BV
Online
2020-06-27
DOI
10.1016/j.apsusc.2020.147034

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