Origin and evolution of a crack in silicon induced by a single grain grinding

标题
Origin and evolution of a crack in silicon induced by a single grain grinding
作者
关键词
Crack, Si, Molecular dynamics, TEM, Median
出版物
Journal of Manufacturing Processes
Volume 75, Issue -, Pages 617-626
出版商
Elsevier BV
发表日期
2022-01-25
DOI
10.1016/j.jmapro.2022.01.037

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