Ultraprecision surface flattening of porous silicon by diamond turning

Published 2017 View Full Article

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Title
Ultraprecision surface flattening of porous silicon by diamond turning
Authors
Keywords
Porous material, Single-crystal silicon, Diamond turning, Material removal mechanism, Subsurface damage, Surface quality
Journal
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume 49, Issue -, Pages 262-277
Publisher
Elsevier BV
Online
2017-03-02
DOI
10.1016/j.precisioneng.2017.02.015

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