Comparative study of structural and stoichiometric properties of titanium nitride films deposited by cathodic cage plasma deposition and magnetron sputtering
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Title
Comparative study of structural and stoichiometric properties of titanium nitride films deposited by cathodic cage plasma deposition and magnetron sputtering
Authors
Keywords
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Journal
European Physical Journal Plus
Volume 137, Issue 3, Pages -
Publisher
Springer Science and Business Media LLC
Online
2022-03-09
DOI
10.1140/epjp/s13360-022-02543-8
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