Comparative study of structural and stoichiometric properties of titanium nitride films deposited by cathodic cage plasma deposition and magnetron sputtering

Title
Comparative study of structural and stoichiometric properties of titanium nitride films deposited by cathodic cage plasma deposition and magnetron sputtering
Authors
Keywords
-
Journal
European Physical Journal Plus
Volume 137, Issue 3, Pages -
Publisher
Springer Science and Business Media LLC
Online
2022-03-09
DOI
10.1140/epjp/s13360-022-02543-8

Ask authors/readers for more resources

Reprint

Contact the author

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started