Journal
EUROPEAN PHYSICAL JOURNAL PLUS
Volume 130, Issue 2, Pages -Publisher
SPRINGER HEIDELBERG
DOI: 10.1140/epjp/i2015-15029-1
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Titanium nitride (TiN) thin films were grown onto 316 stainless steel substrate at 350 degrees C by hollow cathode discharge ion plating technique. Since microstructure and mechanical properties of the samples were strongly affected by bias voltage, different bias voltages from 0 to | - 120| V were applied to the substrate. Rutherford back-scattering spectroscopy showed that the film thickness decreased when the bias voltage increased. X-ray diffraction patterns showed that the as-prepared TiN thin films were preferentially grown in the (200) direction with a satisfactory crystal quality at -30V. The spatial scaling behavior of the TiN films grown by ion coating have been investigated by using the atomic force microscopy as well as a kinetic roughening model for the film thickness ranging from 380 to 590 nm. The roughness and dynamic scaling exponents have been independently measured (alpha = 0.7 +/- 0.05 and z = 3.03 +/- 0.05) and they exhibited a smooth surface growth. Nanohardness showed formation of a film with 30 GPa hardness and 285 GPa Young modulus at -30V bias voltage.
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