Comparative study of structural and stoichiometric properties of titanium nitride films deposited by cathodic cage plasma deposition and magnetron sputtering
出版年份 2022 全文链接
标题
Comparative study of structural and stoichiometric properties of titanium nitride films deposited by cathodic cage plasma deposition and magnetron sputtering
作者
关键词
-
出版物
European Physical Journal Plus
Volume 137, Issue 3, Pages -
出版商
Springer Science and Business Media LLC
发表日期
2022-03-09
DOI
10.1140/epjp/s13360-022-02543-8
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