Numerical investigation on subsurface damage in nanometric cutting of single-crystal silicon at elevated temperatures

Title
Numerical investigation on subsurface damage in nanometric cutting of single-crystal silicon at elevated temperatures
Authors
Keywords
Molecular dynamics simulation, Single-crystal silicon, Thermal assisted machining, Subsurface damage
Journal
Journal of Manufacturing Processes
Volume 68, Issue -, Pages 1060-1071
Publisher
Elsevier BV
Online
2021-06-26
DOI
10.1016/j.jmapro.2021.06.040

Ask authors/readers for more resources

Reprint

Contact the author

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started