Numerical investigation on subsurface damage in nanometric cutting of single-crystal silicon at elevated temperatures
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Title
Numerical investigation on subsurface damage in nanometric cutting of single-crystal silicon at elevated temperatures
Authors
Keywords
Molecular dynamics simulation, Single-crystal silicon, Thermal assisted machining, Subsurface damage
Journal
Journal of Manufacturing Processes
Volume 68, Issue -, Pages 1060-1071
Publisher
Elsevier BV
Online
2021-06-26
DOI
10.1016/j.jmapro.2021.06.040
References
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