Super-hard and anti-corrosion (AlCrMoSiTi)Nx high entropy nitride coatings by multi-arc cathodic vacuum magnetic filtration deposition
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Title
Super-hard and anti-corrosion (AlCrMoSiTi)Nx high entropy nitride coatings by multi-arc cathodic vacuum magnetic filtration deposition
Authors
Keywords
(AlCrMoSiTi)N, x, nitride coatings, Multi-arc cathodic vacuum magnetic filtration deposition, Face-centered-cubic, N, 2, gas flow rate, Super-hardness
Journal
VACUUM
Volume 195, Issue -, Pages 110685
Publisher
Elsevier BV
Online
2021-10-19
DOI
10.1016/j.vacuum.2021.110685
References
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