Growth (AlCrNbSiTiV)N thin films on the interrupted turning and properties using DCMS and HIPIMS system

Published 2018 View Full Article

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Title
Growth (AlCrNbSiTiV)N thin films on the interrupted turning and properties using DCMS and HIPIMS system
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 440, Issue -, Pages 1-7
Publisher
Elsevier BV
Online
2018-01-12
DOI
10.1016/j.apsusc.2018.01.110

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