Multi-component (Al,Cr,Nb,Y,Zr)N thin films by reactive magnetron sputter deposition for increased hardness and corrosion resistance

Published 2019 View Full Article

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Title
Multi-component (Al,Cr,Nb,Y,Zr)N thin films by reactive magnetron sputter deposition for increased hardness and corrosion resistance
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 693, Issue -, Pages 137685
Publisher
Elsevier BV
Online
2019-11-05
DOI
10.1016/j.tsf.2019.137685

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