Effect of nitrogen doping on the structural, optical and electrical properties of indium tin oxide films prepared by magnetron sputtering for gallium nitride light emitting diodes

Title
Effect of nitrogen doping on the structural, optical and electrical properties of indium tin oxide films prepared by magnetron sputtering for gallium nitride light emitting diodes
Authors
Keywords
Indium tin oxide, Nitrogen doping, Magnetron sputtering, X-ray photoelectron spectroscopy, High resolution transmission electron microscope, Gallium nitride based light emitting diodes
Journal
SUPERLATTICES AND MICROSTRUCTURES
Volume 101, Issue -, Pages 261-270
Publisher
Elsevier BV
Online
2016-11-28
DOI
10.1016/j.spmi.2016.11.054

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