High temperature sensors fabricated on Al 2 O 3 ceramic and nickel-based superalloy substrates

Published 2016 View Full Article

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Title
High temperature sensors fabricated on Al 2 O 3 ceramic and nickel-based superalloy substrates
Authors
Keywords
Resistance temperature sensors, Al, 2, O, 3, thin films, High temperature insulators, Electrical properties, Sputtering
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 247, Issue -, Pages 75-82
Publisher
Elsevier BV
Online
2016-06-03
DOI
10.1016/j.sna.2016.05.048

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